10/22/2010	10:12:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2010	10:12:40 AM	Recipe started at 10:12 AM
10/22/2010	10:12:40 AM	H2 valve closed
10/22/2010	10:12:40 AM	BCl3 valve closed
10/22/2010	10:12:40 AM	PH3 valve closed
10/22/2010	10:12:40 AM	SiCl4 pre valve closed
10/22/2010	10:12:40 AM	SiCl4 post valve closed
10/22/2010	10:12:40 AM	Main Vac valve closed
10/22/2010	10:12:40 AM	Bypass valve closed
10/22/2010	10:12:40 AM	Bubbler valve closed
10/22/2010	10:12:40 AM	Helium valve opened
10/22/2010	10:12:40 AM	Helium MFC set to  500.000000
10/22/2010	10:12:40 AM	H2 MFC set to  0.000000
10/22/2010	10:12:40 AM	BCl3 MFC set to  0.000000
10/22/2010	10:12:40 AM	PHl3 MFC set to  0.000000
10/22/2010	10:12:40 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:12:40 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:12:40 AM	Tube furnace set to 0
10/22/2010	10:13:59 AM	Helium valve closed
10/22/2010	10:13:59 AM	H2 valve closed
10/22/2010	10:13:59 AM	BCl3 valve closed
10/22/2010	10:13:59 AM	PH3 valve closed
10/22/2010	10:13:59 AM	SiCl4 pre valve closed
10/22/2010	10:13:59 AM	SiCl4 post valve closed
10/22/2010	10:13:59 AM	Main Vac valve closed
10/22/2010	10:13:59 AM	Bypass valve closed
10/22/2010	10:13:59 AM	Bubbler valve closed
10/22/2010	10:13:59 AM	Helium MFC set to  0.000000
10/22/2010	10:13:59 AM	H2 MFC set to  0.000000
10/22/2010	10:13:59 AM	BCl3 MFC set to  0.000000
10/22/2010	10:13:59 AM	PHl3 MFC set to  0.000000
10/22/2010	10:13:59 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:13:59 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:14:00 AM	Tube furnace set to 0
10/22/2010	10:14:00 AM	Run finished at 10:14 AM
10/22/2010	10:14:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2010	10:18:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2010	10:18:34 AM	Recipe started at 10:18 AM
10/22/2010	10:18:34 AM	Helium valve closed
10/22/2010	10:18:34 AM	H2 valve closed
10/22/2010	10:18:34 AM	BCl3 valve closed
10/22/2010	10:18:34 AM	PH3 valve closed
10/22/2010	10:18:34 AM	SiCl4 pre valve closed
10/22/2010	10:18:34 AM	SiCl4 post valve closed
10/22/2010	10:18:34 AM	Main Vac valve closed
10/22/2010	10:18:34 AM	Bubbler valve closed
10/22/2010	10:18:34 AM	Bypass valve opened
10/22/2010	10:18:34 AM	Helium MFC set to  0.000000
10/22/2010	10:18:34 AM	H2 MFC set to  0.000000
10/22/2010	10:18:34 AM	BCl3 MFC set to  0.000000
10/22/2010	10:18:34 AM	PHl3 MFC set to  0.000000
10/22/2010	10:18:34 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:18:34 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:18:34 AM	Tube furnace set to 0
10/22/2010	10:19:22 AM	Helium valve closed
10/22/2010	10:19:22 AM	H2 valve closed
10/22/2010	10:19:22 AM	BCl3 valve closed
10/22/2010	10:19:22 AM	PH3 valve closed
10/22/2010	10:19:22 AM	SiCl4 pre valve closed
10/22/2010	10:19:22 AM	SiCl4 post valve closed
10/22/2010	10:19:22 AM	Bubbler valve closed
10/22/2010	10:19:22 AM	Main Vac valve opened
10/22/2010	10:19:22 AM	Bypass valve opened
10/22/2010	10:19:22 AM	Helium MFC set to  0.000000
10/22/2010	10:19:22 AM	H2 MFC set to  0.000000
10/22/2010	10:19:22 AM	BCl3 MFC set to  0.000000
10/22/2010	10:19:22 AM	PHl3 MFC set to  0.000000
10/22/2010	10:19:22 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:19:22 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:19:23 AM	Tube furnace set to 0
10/22/2010	10:19:23 AM	Run finished at 10:19 AM
10/22/2010	10:19:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2010	10:31:03 AM	Helium valve opened
10/22/2010	10:31:05 AM	Helium MFC set to  100.000000
10/22/2010	10:31:11 AM	Helium valve closed
10/22/2010	10:31:13 AM	Helium MFC set to  0.000000
10/22/2010	10:31:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/22/2010	10:31:27 AM	Recipe started at 10:31 AM
10/22/2010	10:31:27 AM	Helium valve closed
10/22/2010	10:31:27 AM	H2 valve closed
10/22/2010	10:31:27 AM	BCl3 valve closed
10/22/2010	10:31:27 AM	PH3 valve closed
10/22/2010	10:31:27 AM	SiCl4 pre valve closed
10/22/2010	10:31:27 AM	SiCl4 post valve closed
10/22/2010	10:31:27 AM	Main Vac valve closed
10/22/2010	10:31:27 AM	Bubbler valve closed
10/22/2010	10:31:27 AM	Bypass valve opened
10/22/2010	10:31:27 AM	Helium MFC set to  0.000000
10/22/2010	10:31:27 AM	H2 MFC set to  0.000000
10/22/2010	10:31:27 AM	BCl3 MFC set to  0.000000
10/22/2010	10:31:27 AM	PHl3 MFC set to  0.000000
10/22/2010	10:31:27 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:31:27 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:31:27 AM	Tube furnace set to 0
10/22/2010	10:31:27 AM	Helium valve closed
10/22/2010	10:31:27 AM	H2 valve closed
10/22/2010	10:31:27 AM	BCl3 valve closed
10/22/2010	10:31:27 AM	PH3 valve closed
10/22/2010	10:31:27 AM	SiCl4 pre valve closed
10/22/2010	10:31:27 AM	SiCl4 post valve closed
10/22/2010	10:31:27 AM	Bubbler valve closed
10/22/2010	10:31:27 AM	Main Vac valve opened
10/22/2010	10:31:27 AM	Bypass valve opened
10/22/2010	10:31:27 AM	Helium MFC set to  0.000000
10/22/2010	10:31:27 AM	H2 MFC set to  0.000000
10/22/2010	10:31:27 AM	BCl3 MFC set to  0.000000
10/22/2010	10:31:27 AM	PHl3 MFC set to  0.000000
10/22/2010	10:31:27 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:31:27 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:31:27 AM	Tube furnace set to 0
10/22/2010	10:32:27 AM	H2 valve closed
10/22/2010	10:32:27 AM	BCl3 valve closed
10/22/2010	10:32:27 AM	PH3 valve closed
10/22/2010	10:32:27 AM	SiCl4 pre valve closed
10/22/2010	10:32:27 AM	SiCl4 post valve closed
10/22/2010	10:32:27 AM	Bubbler valve closed
10/22/2010	10:32:27 AM	Helium valve opened
10/22/2010	10:32:27 AM	Main Vac valve opened
10/22/2010	10:32:27 AM	Bypass valve opened
10/22/2010	10:32:27 AM	Helium MFC set to  100.000000
10/22/2010	10:32:27 AM	H2 MFC set to  0.000000
10/22/2010	10:32:27 AM	BCl3 MFC set to  0.000000
10/22/2010	10:32:27 AM	PHl3 MFC set to  0.000000
10/22/2010	10:32:27 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:32:27 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:32:27 AM	Tube furnace set to 0
10/22/2010	10:33:27 AM	Helium valve closed
10/22/2010	10:33:27 AM	H2 valve closed
10/22/2010	10:33:27 AM	BCl3 valve closed
10/22/2010	10:33:27 AM	PH3 valve closed
10/22/2010	10:33:27 AM	SiCl4 pre valve closed
10/22/2010	10:33:27 AM	SiCl4 post valve closed
10/22/2010	10:33:27 AM	Bubbler valve closed
10/22/2010	10:33:27 AM	Main Vac valve opened
10/22/2010	10:33:27 AM	Bypass valve opened
10/22/2010	10:33:27 AM	Helium MFC set to  0.000000
10/22/2010	10:33:27 AM	H2 MFC set to  0.000000
10/22/2010	10:33:27 AM	BCl3 MFC set to  0.000000
10/22/2010	10:33:27 AM	PHl3 MFC set to  0.000000
10/22/2010	10:33:27 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:33:27 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:33:28 AM	Tube furnace set to 0
10/22/2010	10:34:28 AM	H2 valve closed
10/22/2010	10:34:28 AM	BCl3 valve closed
10/22/2010	10:34:28 AM	PH3 valve closed
10/22/2010	10:34:28 AM	SiCl4 pre valve closed
10/22/2010	10:34:28 AM	SiCl4 post valve closed
10/22/2010	10:34:28 AM	Bubbler valve closed
10/22/2010	10:34:28 AM	Helium valve opened
10/22/2010	10:34:28 AM	Main Vac valve opened
10/22/2010	10:34:28 AM	Bypass valve opened
10/22/2010	10:34:28 AM	Helium MFC set to  100.000000
10/22/2010	10:34:28 AM	H2 MFC set to  0.000000
10/22/2010	10:34:28 AM	BCl3 MFC set to  0.000000
10/22/2010	10:34:28 AM	PHl3 MFC set to  0.000000
10/22/2010	10:34:28 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:34:28 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:34:28 AM	Tube furnace set to 0
10/22/2010	10:35:28 AM	Helium valve closed
10/22/2010	10:35:28 AM	H2 valve closed
10/22/2010	10:35:28 AM	BCl3 valve closed
10/22/2010	10:35:28 AM	PH3 valve closed
10/22/2010	10:35:28 AM	SiCl4 pre valve closed
10/22/2010	10:35:28 AM	SiCl4 post valve closed
10/22/2010	10:35:28 AM	Bubbler valve closed
10/22/2010	10:35:28 AM	Main Vac valve opened
10/22/2010	10:35:28 AM	Bypass valve opened
10/22/2010	10:35:28 AM	Helium MFC set to  0.000000
10/22/2010	10:35:28 AM	H2 MFC set to  0.000000
10/22/2010	10:35:28 AM	BCl3 MFC set to  0.000000
10/22/2010	10:35:28 AM	PHl3 MFC set to  0.000000
10/22/2010	10:35:28 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:35:28 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:35:28 AM	Tube furnace set to 0
10/22/2010	10:36:28 AM	H2 valve closed
10/22/2010	10:36:28 AM	BCl3 valve closed
10/22/2010	10:36:28 AM	PH3 valve closed
10/22/2010	10:36:28 AM	SiCl4 pre valve closed
10/22/2010	10:36:28 AM	SiCl4 post valve closed
10/22/2010	10:36:28 AM	Bubbler valve closed
10/22/2010	10:36:28 AM	Helium valve opened
10/22/2010	10:36:28 AM	Main Vac valve opened
10/22/2010	10:36:28 AM	Bypass valve opened
10/22/2010	10:36:28 AM	Helium MFC set to  100.000000
10/22/2010	10:36:28 AM	H2 MFC set to  0.000000
10/22/2010	10:36:28 AM	BCl3 MFC set to  0.000000
10/22/2010	10:36:28 AM	PHl3 MFC set to  0.000000
10/22/2010	10:36:28 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:36:28 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:36:28 AM	Tube furnace set to 0
10/22/2010	10:37:28 AM	Helium valve closed
10/22/2010	10:37:28 AM	H2 valve closed
10/22/2010	10:37:28 AM	BCl3 valve closed
10/22/2010	10:37:28 AM	PH3 valve closed
10/22/2010	10:37:28 AM	SiCl4 pre valve closed
10/22/2010	10:37:28 AM	SiCl4 post valve closed
10/22/2010	10:37:28 AM	Bubbler valve closed
10/22/2010	10:37:28 AM	Main Vac valve opened
10/22/2010	10:37:28 AM	Bypass valve opened
10/22/2010	10:37:28 AM	Helium MFC set to  0.000000
10/22/2010	10:37:28 AM	H2 MFC set to  0.000000
10/22/2010	10:37:28 AM	BCl3 MFC set to  0.000000
10/22/2010	10:37:28 AM	PHl3 MFC set to  0.000000
10/22/2010	10:37:28 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:37:28 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:37:28 AM	Tube furnace set to 0
10/22/2010	10:38:28 AM	H2 valve closed
10/22/2010	10:38:28 AM	BCl3 valve closed
10/22/2010	10:38:28 AM	PH3 valve closed
10/22/2010	10:38:28 AM	SiCl4 pre valve closed
10/22/2010	10:38:28 AM	SiCl4 post valve closed
10/22/2010	10:38:28 AM	Bubbler valve closed
10/22/2010	10:38:28 AM	Helium valve opened
10/22/2010	10:38:28 AM	Main Vac valve opened
10/22/2010	10:38:28 AM	Bypass valve opened
10/22/2010	10:38:28 AM	Helium MFC set to  100.000000
10/22/2010	10:38:28 AM	H2 MFC set to  0.000000
10/22/2010	10:38:28 AM	BCl3 MFC set to  0.000000
10/22/2010	10:38:28 AM	PHl3 MFC set to  0.000000
10/22/2010	10:38:28 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:38:28 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:38:29 AM	Tube furnace set to 0
10/22/2010	10:39:29 AM	Helium valve closed
10/22/2010	10:39:29 AM	H2 valve closed
10/22/2010	10:39:29 AM	BCl3 valve closed
10/22/2010	10:39:29 AM	PH3 valve closed
10/22/2010	10:39:29 AM	SiCl4 pre valve closed
10/22/2010	10:39:29 AM	SiCl4 post valve closed
10/22/2010	10:39:29 AM	Bubbler valve closed
10/22/2010	10:39:29 AM	Main Vac valve opened
10/22/2010	10:39:29 AM	Bypass valve opened
10/22/2010	10:39:29 AM	Helium MFC set to  0.000000
10/22/2010	10:39:29 AM	H2 MFC set to  0.000000
10/22/2010	10:39:29 AM	BCl3 MFC set to  0.000000
10/22/2010	10:39:29 AM	PHl3 MFC set to  0.000000
10/22/2010	10:39:29 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:39:29 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:39:29 AM	Tube furnace set to 0
10/22/2010	10:40:29 AM	H2 valve closed
10/22/2010	10:40:29 AM	BCl3 valve closed
10/22/2010	10:40:29 AM	PH3 valve closed
10/22/2010	10:40:29 AM	SiCl4 pre valve closed
10/22/2010	10:40:29 AM	SiCl4 post valve closed
10/22/2010	10:40:29 AM	Bubbler valve closed
10/22/2010	10:40:29 AM	Helium valve opened
10/22/2010	10:40:29 AM	Main Vac valve opened
10/22/2010	10:40:29 AM	Bypass valve opened
10/22/2010	10:40:29 AM	Helium MFC set to  100.000000
10/22/2010	10:40:29 AM	H2 MFC set to  0.000000
10/22/2010	10:40:29 AM	BCl3 MFC set to  0.000000
10/22/2010	10:40:29 AM	PHl3 MFC set to  0.000000
10/22/2010	10:40:29 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:40:29 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:40:29 AM	Tube furnace set to 0
10/22/2010	10:41:29 AM	Helium valve closed
10/22/2010	10:41:29 AM	H2 valve closed
10/22/2010	10:41:29 AM	BCl3 valve closed
10/22/2010	10:41:29 AM	PH3 valve closed
10/22/2010	10:41:29 AM	SiCl4 pre valve closed
10/22/2010	10:41:29 AM	SiCl4 post valve closed
10/22/2010	10:41:29 AM	Bubbler valve closed
10/22/2010	10:41:29 AM	Main Vac valve opened
10/22/2010	10:41:29 AM	Bypass valve opened
10/22/2010	10:41:29 AM	Helium MFC set to  0.000000
10/22/2010	10:41:29 AM	H2 MFC set to  0.000000
10/22/2010	10:41:29 AM	BCl3 MFC set to  0.000000
10/22/2010	10:41:29 AM	PHl3 MFC set to  0.000000
10/22/2010	10:41:29 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:41:29 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:41:29 AM	Tube furnace set to 0
10/22/2010	10:42:29 AM	H2 valve closed
10/22/2010	10:42:29 AM	BCl3 valve closed
10/22/2010	10:42:29 AM	PH3 valve closed
10/22/2010	10:42:29 AM	SiCl4 pre valve closed
10/22/2010	10:42:29 AM	SiCl4 post valve closed
10/22/2010	10:42:29 AM	Bubbler valve closed
10/22/2010	10:42:29 AM	Helium valve opened
10/22/2010	10:42:29 AM	Main Vac valve opened
10/22/2010	10:42:29 AM	Bypass valve opened
10/22/2010	10:42:29 AM	Helium MFC set to  100.000000
10/22/2010	10:42:29 AM	H2 MFC set to  0.000000
10/22/2010	10:42:29 AM	BCl3 MFC set to  0.000000
10/22/2010	10:42:29 AM	PHl3 MFC set to  0.000000
10/22/2010	10:42:29 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:42:29 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:42:29 AM	Tube furnace set to 0
10/22/2010	10:43:29 AM	Helium valve closed
10/22/2010	10:43:29 AM	H2 valve closed
10/22/2010	10:43:29 AM	BCl3 valve closed
10/22/2010	10:43:29 AM	PH3 valve closed
10/22/2010	10:43:29 AM	SiCl4 pre valve closed
10/22/2010	10:43:29 AM	SiCl4 post valve closed
10/22/2010	10:43:29 AM	Bubbler valve closed
10/22/2010	10:43:29 AM	Main Vac valve opened
10/22/2010	10:43:29 AM	Bypass valve opened
10/22/2010	10:43:29 AM	Helium MFC set to  0.000000
10/22/2010	10:43:29 AM	H2 MFC set to  0.000000
10/22/2010	10:43:29 AM	BCl3 MFC set to  0.000000
10/22/2010	10:43:29 AM	PHl3 MFC set to  0.000000
10/22/2010	10:43:29 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:43:29 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:43:30 AM	Tube furnace set to 0
10/22/2010	10:44:30 AM	H2 valve closed
10/22/2010	10:44:30 AM	BCl3 valve closed
10/22/2010	10:44:30 AM	PH3 valve closed
10/22/2010	10:44:30 AM	SiCl4 pre valve closed
10/22/2010	10:44:30 AM	SiCl4 post valve closed
10/22/2010	10:44:30 AM	Bubbler valve closed
10/22/2010	10:44:30 AM	Helium valve opened
10/22/2010	10:44:30 AM	Main Vac valve opened
10/22/2010	10:44:30 AM	Bypass valve opened
10/22/2010	10:44:30 AM	Helium MFC set to  100.000000
10/22/2010	10:44:30 AM	H2 MFC set to  0.000000
10/22/2010	10:44:30 AM	BCl3 MFC set to  0.000000
10/22/2010	10:44:30 AM	PHl3 MFC set to  0.000000
10/22/2010	10:44:30 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:44:30 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:44:30 AM	Tube furnace set to 0
10/22/2010	10:45:30 AM	Helium valve closed
10/22/2010	10:45:30 AM	H2 valve closed
10/22/2010	10:45:30 AM	BCl3 valve closed
10/22/2010	10:45:30 AM	PH3 valve closed
10/22/2010	10:45:30 AM	SiCl4 pre valve closed
10/22/2010	10:45:30 AM	SiCl4 post valve closed
10/22/2010	10:45:30 AM	Bubbler valve closed
10/22/2010	10:45:30 AM	Main Vac valve opened
10/22/2010	10:45:30 AM	Bypass valve opened
10/22/2010	10:45:30 AM	Helium MFC set to  0.000000
10/22/2010	10:45:30 AM	H2 MFC set to  0.000000
10/22/2010	10:45:30 AM	BCl3 MFC set to  0.000000
10/22/2010	10:45:30 AM	PHl3 MFC set to  0.000000
10/22/2010	10:45:30 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:45:30 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:45:30 AM	Tube furnace set to 0
10/22/2010	10:46:30 AM	H2 valve closed
10/22/2010	10:46:30 AM	BCl3 valve closed
10/22/2010	10:46:30 AM	PH3 valve closed
10/22/2010	10:46:30 AM	SiCl4 pre valve closed
10/22/2010	10:46:30 AM	SiCl4 post valve closed
10/22/2010	10:46:30 AM	Bubbler valve closed
10/22/2010	10:46:30 AM	Helium valve opened
10/22/2010	10:46:30 AM	Main Vac valve opened
10/22/2010	10:46:30 AM	Bypass valve opened
10/22/2010	10:46:30 AM	Helium MFC set to  100.000000
10/22/2010	10:46:30 AM	H2 MFC set to  0.000000
10/22/2010	10:46:30 AM	BCl3 MFC set to  0.000000
10/22/2010	10:46:30 AM	PHl3 MFC set to  0.000000
10/22/2010	10:46:30 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:46:30 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:46:30 AM	Tube furnace set to 0
10/22/2010	10:47:30 AM	Helium valve closed
10/22/2010	10:47:30 AM	H2 valve closed
10/22/2010	10:47:30 AM	BCl3 valve closed
10/22/2010	10:47:30 AM	PH3 valve closed
10/22/2010	10:47:30 AM	SiCl4 pre valve closed
10/22/2010	10:47:30 AM	SiCl4 post valve closed
10/22/2010	10:47:30 AM	Bubbler valve closed
10/22/2010	10:47:30 AM	Main Vac valve opened
10/22/2010	10:47:30 AM	Bypass valve opened
10/22/2010	10:47:30 AM	Helium MFC set to  0.000000
10/22/2010	10:47:30 AM	H2 MFC set to  0.000000
10/22/2010	10:47:30 AM	BCl3 MFC set to  0.000000
10/22/2010	10:47:30 AM	PHl3 MFC set to  0.000000
10/22/2010	10:47:30 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:47:30 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:47:30 AM	Tube furnace set to 0
10/22/2010	10:48:30 AM	H2 valve closed
10/22/2010	10:48:30 AM	BCl3 valve closed
10/22/2010	10:48:30 AM	PH3 valve closed
10/22/2010	10:48:30 AM	SiCl4 pre valve closed
10/22/2010	10:48:30 AM	SiCl4 post valve closed
10/22/2010	10:48:30 AM	Bubbler valve closed
10/22/2010	10:48:30 AM	Helium valve opened
10/22/2010	10:48:30 AM	Main Vac valve opened
10/22/2010	10:48:30 AM	Bypass valve opened
10/22/2010	10:48:30 AM	Helium MFC set to  100.000000
10/22/2010	10:48:30 AM	H2 MFC set to  0.000000
10/22/2010	10:48:30 AM	BCl3 MFC set to  0.000000
10/22/2010	10:48:30 AM	PHl3 MFC set to  0.000000
10/22/2010	10:48:30 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:48:30 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:48:31 AM	Tube furnace set to 0
10/22/2010	10:49:31 AM	Helium valve closed
10/22/2010	10:49:31 AM	H2 valve closed
10/22/2010	10:49:31 AM	BCl3 valve closed
10/22/2010	10:49:31 AM	PH3 valve closed
10/22/2010	10:49:31 AM	SiCl4 pre valve closed
10/22/2010	10:49:31 AM	SiCl4 post valve closed
10/22/2010	10:49:31 AM	Bubbler valve closed
10/22/2010	10:49:31 AM	Main Vac valve opened
10/22/2010	10:49:31 AM	Bypass valve opened
10/22/2010	10:49:31 AM	Helium MFC set to  0.000000
10/22/2010	10:49:31 AM	H2 MFC set to  0.000000
10/22/2010	10:49:31 AM	BCl3 MFC set to  0.000000
10/22/2010	10:49:31 AM	PHl3 MFC set to  0.000000
10/22/2010	10:49:31 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:49:31 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:49:31 AM	Tube furnace set to 0
10/22/2010	10:50:31 AM	H2 valve closed
10/22/2010	10:50:31 AM	BCl3 valve closed
10/22/2010	10:50:31 AM	PH3 valve closed
10/22/2010	10:50:31 AM	SiCl4 pre valve closed
10/22/2010	10:50:31 AM	SiCl4 post valve closed
10/22/2010	10:50:31 AM	Bubbler valve closed
10/22/2010	10:50:31 AM	Helium valve opened
10/22/2010	10:50:31 AM	Main Vac valve opened
10/22/2010	10:50:31 AM	Bypass valve opened
10/22/2010	10:50:31 AM	Helium MFC set to  100.000000
10/22/2010	10:50:31 AM	H2 MFC set to  0.000000
10/22/2010	10:50:31 AM	BCl3 MFC set to  0.000000
10/22/2010	10:50:31 AM	PHl3 MFC set to  0.000000
10/22/2010	10:50:31 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:50:31 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:50:31 AM	Tube furnace set to 0
10/22/2010	10:51:31 AM	Helium valve closed
10/22/2010	10:51:31 AM	H2 valve closed
10/22/2010	10:51:31 AM	BCl3 valve closed
10/22/2010	10:51:31 AM	PH3 valve closed
10/22/2010	10:51:31 AM	SiCl4 pre valve closed
10/22/2010	10:51:31 AM	SiCl4 post valve closed
10/22/2010	10:51:31 AM	Bubbler valve closed
10/22/2010	10:51:31 AM	Main Vac valve opened
10/22/2010	10:51:31 AM	Bypass valve opened
10/22/2010	10:51:31 AM	Helium MFC set to  0.000000
10/22/2010	10:51:31 AM	H2 MFC set to  0.000000
10/22/2010	10:51:31 AM	BCl3 MFC set to  0.000000
10/22/2010	10:51:31 AM	PHl3 MFC set to  0.000000
10/22/2010	10:51:31 AM	SiCl4 MFC set to  0.000000
10/22/2010	10:51:31 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	10:51:31 AM	Tube furnace set to 0
10/22/2010	10:51:32 AM	Run finished at 10:51 AM
10/22/2010	10:51:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/22/2010	11:33:39 AM	Helium valve opened
10/22/2010	11:33:41 AM	Helium MFC set to  100.000000
10/22/2010	11:34:06 AM	Helium valve closed
10/22/2010	11:34:08 AM	Helium MFC set to  0.000000
10/22/2010	11:35:22 AM	Tube furnace set to 100
10/22/2010	11:37:25 AM	Recipe started at 11:37 AM
10/22/2010	11:37:25 AM	Helium valve closed
10/22/2010	11:37:25 AM	BCl3 valve closed
10/22/2010	11:37:25 AM	PH3 valve closed
10/22/2010	11:37:25 AM	SiCl4 pre valve closed
10/22/2010	11:37:25 AM	SiCl4 post valve closed
10/22/2010	11:37:25 AM	Main Vac valve closed
10/22/2010	11:37:25 AM	Bypass valve closed
10/22/2010	11:37:25 AM	Bubbler valve closed
10/22/2010	11:37:25 AM	H2 valve opened
10/22/2010	11:37:25 AM	Helium MFC set to  0.000000
10/22/2010	11:37:25 AM	H2 MFC set to  500.000000
10/22/2010	11:37:25 AM	BCl3 MFC set to  0.000000
10/22/2010	11:37:25 AM	PHl3 MFC set to  0.000000
10/22/2010	11:37:25 AM	SiCl4 MFC set to  0.000000
10/22/2010	11:37:25 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	11:37:25 AM	Tube furnace set to 100
10/22/2010	11:38:46 AM	Helium valve closed
10/22/2010	11:38:46 AM	BCl3 valve closed
10/22/2010	11:38:46 AM	PH3 valve closed
10/22/2010	11:38:46 AM	SiCl4 pre valve closed
10/22/2010	11:38:46 AM	SiCl4 post valve closed
10/22/2010	11:38:46 AM	Main Vac valve closed
10/22/2010	11:38:46 AM	Bypass valve closed
10/22/2010	11:38:46 AM	H2 valve opened
10/22/2010	11:38:46 AM	Bubbler valve opened
10/22/2010	11:38:46 AM	Helium MFC set to  0.000000
10/22/2010	11:38:46 AM	H2 MFC set to  500.000000
10/22/2010	11:38:46 AM	BCl3 MFC set to  0.000000
10/22/2010	11:38:46 AM	PHl3 MFC set to  0.000000
10/22/2010	11:38:46 AM	SiCl4 MFC set to  0.000000
10/22/2010	11:38:46 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	11:38:46 AM	Tube furnace set to 1000
10/22/2010	11:58:46 AM	Helium valve closed
10/22/2010	11:58:46 AM	PH3 valve closed
10/22/2010	11:58:46 AM	Main Vac valve closed
10/22/2010	11:58:46 AM	Bypass valve closed
10/22/2010	11:58:46 AM	H2 valve opened
10/22/2010	11:58:46 AM	BCl3 valve opened
10/22/2010	11:58:46 AM	SiCl4 pre valve opened
10/22/2010	11:58:46 AM	SiCl4 post valve opened
10/22/2010	11:58:46 AM	Bubbler valve opened
10/22/2010	11:58:46 AM	Helium MFC set to  0.000000
10/22/2010	11:58:46 AM	H2 MFC set to  500.000000
10/22/2010	11:58:46 AM	BCl3 MFC set to  10.000000
10/22/2010	11:58:46 AM	PHl3 MFC set to  0.000000
10/22/2010	11:58:46 AM	SiCl4 MFC set to  50.000000
10/22/2010	11:58:46 AM	Bypass solenoid MFC set to  0.000000
10/22/2010	11:58:46 AM	Tube furnace set to 1000
10/22/2010	12:10:46 PM	H2 valve closed
10/22/2010	12:10:46 PM	BCl3 valve closed
10/22/2010	12:10:46 PM	PH3 valve closed
10/22/2010	12:10:46 PM	SiCl4 pre valve closed
10/22/2010	12:10:46 PM	SiCl4 post valve closed
10/22/2010	12:10:46 PM	Main Vac valve closed
10/22/2010	12:10:46 PM	Bypass valve closed
10/22/2010	12:10:46 PM	Helium valve opened
10/22/2010	12:10:46 PM	Bubbler valve opened
10/22/2010	12:10:46 PM	Helium MFC set to  500.000000
10/22/2010	12:10:46 PM	H2 MFC set to  0.000000
10/22/2010	12:10:46 PM	BCl3 MFC set to  0.000000
10/22/2010	12:10:46 PM	PHl3 MFC set to  0.000000
10/22/2010	12:10:46 PM	SiCl4 MFC set to  0.000000
10/22/2010	12:10:46 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	12:10:46 PM	Tube furnace set to 0
10/22/2010	12:30:46 PM	Helium valve closed
10/22/2010	12:30:46 PM	H2 valve closed
10/22/2010	12:30:46 PM	BCl3 valve closed
10/22/2010	12:30:46 PM	PH3 valve closed
10/22/2010	12:30:46 PM	SiCl4 pre valve closed
10/22/2010	12:30:46 PM	SiCl4 post valve closed
10/22/2010	12:30:46 PM	Main Vac valve closed
10/22/2010	12:30:46 PM	Bypass valve closed
10/22/2010	12:30:46 PM	Bubbler valve closed
10/22/2010	12:30:46 PM	Helium MFC set to  0.000000
10/22/2010	12:30:46 PM	H2 MFC set to  0.000000
10/22/2010	12:30:46 PM	BCl3 MFC set to  0.000000
10/22/2010	12:30:46 PM	PHl3 MFC set to  0.000000
10/22/2010	12:30:46 PM	SiCl4 MFC set to  0.000000
10/22/2010	12:30:46 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	12:30:46 PM	Tube furnace set to 0
10/22/2010	12:30:47 PM	Run finished at 12:30 PM
10/22/2010	1:23:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2010	1:23:48 PM	Recipe started at 1:23 PM
10/22/2010	1:23:48 PM	Helium valve closed
10/22/2010	1:23:48 PM	H2 valve closed
10/22/2010	1:23:48 PM	BCl3 valve closed
10/22/2010	1:23:48 PM	PH3 valve closed
10/22/2010	1:23:48 PM	SiCl4 pre valve closed
10/22/2010	1:23:48 PM	SiCl4 post valve closed
10/22/2010	1:23:48 PM	Main Vac valve closed
10/22/2010	1:23:48 PM	Bubbler valve closed
10/22/2010	1:23:48 PM	Bypass valve opened
10/22/2010	1:23:48 PM	Helium MFC set to  0.000000
10/22/2010	1:23:48 PM	H2 MFC set to  0.000000
10/22/2010	1:23:48 PM	BCl3 MFC set to  0.000000
10/22/2010	1:23:48 PM	PHl3 MFC set to  0.000000
10/22/2010	1:23:48 PM	SiCl4 MFC set to  0.000000
10/22/2010	1:23:48 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	1:23:48 PM	Tube furnace set to 0
10/22/2010	1:24:37 PM	Helium valve closed
10/22/2010	1:24:37 PM	H2 valve closed
10/22/2010	1:24:37 PM	BCl3 valve closed
10/22/2010	1:24:37 PM	PH3 valve closed
10/22/2010	1:24:37 PM	SiCl4 pre valve closed
10/22/2010	1:24:37 PM	SiCl4 post valve closed
10/22/2010	1:24:37 PM	Bubbler valve closed
10/22/2010	1:24:37 PM	Main Vac valve opened
10/22/2010	1:24:37 PM	Bypass valve opened
10/22/2010	1:24:37 PM	Helium MFC set to  0.000000
10/22/2010	1:24:37 PM	H2 MFC set to  0.000000
10/22/2010	1:24:37 PM	BCl3 MFC set to  0.000000
10/22/2010	1:24:37 PM	PHl3 MFC set to  0.000000
10/22/2010	1:24:37 PM	SiCl4 MFC set to  0.000000
10/22/2010	1:24:37 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	1:24:37 PM	Tube furnace set to 0
10/22/2010	1:24:38 PM	Run finished at 1:24 PM
10/22/2010	1:24:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2010	2:22:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/22/2010	2:22:24 PM	Recipe started at 2:22 PM
10/22/2010	2:22:24 PM	Helium valve closed
10/22/2010	2:22:24 PM	H2 valve closed
10/22/2010	2:22:24 PM	BCl3 valve closed
10/22/2010	2:22:24 PM	PH3 valve closed
10/22/2010	2:22:24 PM	SiCl4 pre valve closed
10/22/2010	2:22:24 PM	SiCl4 post valve closed
10/22/2010	2:22:24 PM	Main Vac valve closed
10/22/2010	2:22:24 PM	Bubbler valve closed
10/22/2010	2:22:24 PM	Bypass valve opened
10/22/2010	2:22:24 PM	Helium MFC set to  0.000000
10/22/2010	2:22:24 PM	H2 MFC set to  0.000000
10/22/2010	2:22:24 PM	BCl3 MFC set to  0.000000
10/22/2010	2:22:24 PM	PHl3 MFC set to  0.000000
10/22/2010	2:22:24 PM	SiCl4 MFC set to  0.000000
10/22/2010	2:22:24 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	2:22:25 PM	Tube furnace set to 0
10/22/2010	2:22:25 PM	Helium valve closed
10/22/2010	2:22:25 PM	H2 valve closed
10/22/2010	2:22:25 PM	BCl3 valve closed
10/22/2010	2:22:25 PM	PH3 valve closed
10/22/2010	2:22:25 PM	SiCl4 pre valve closed
10/22/2010	2:22:25 PM	SiCl4 post valve closed
10/22/2010	2:22:25 PM	Bubbler valve closed
10/22/2010	2:22:25 PM	Main Vac valve opened
10/22/2010	2:22:25 PM	Bypass valve opened
10/22/2010	2:22:25 PM	Helium MFC set to  0.000000
10/22/2010	2:22:25 PM	H2 MFC set to  0.000000
10/22/2010	2:22:25 PM	BCl3 MFC set to  0.000000
10/22/2010	2:22:25 PM	PHl3 MFC set to  0.000000
10/22/2010	2:22:25 PM	SiCl4 MFC set to  0.000000
10/22/2010	2:22:25 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	2:22:25 PM	Tube furnace set to 0
10/22/2010	2:23:25 PM	H2 valve closed
10/22/2010	2:23:25 PM	BCl3 valve closed
10/22/2010	2:23:25 PM	PH3 valve closed
10/22/2010	2:23:25 PM	SiCl4 pre valve closed
10/22/2010	2:23:25 PM	SiCl4 post valve closed
10/22/2010	2:23:25 PM	Bubbler valve closed
10/22/2010	2:23:25 PM	Helium valve opened
10/22/2010	2:23:25 PM	Main Vac valve opened
10/22/2010	2:23:25 PM	Bypass valve opened
10/22/2010	2:23:25 PM	Helium MFC set to  100.000000
10/22/2010	2:23:25 PM	H2 MFC set to  0.000000
10/22/2010	2:23:25 PM	BCl3 MFC set to  0.000000
10/22/2010	2:23:25 PM	PHl3 MFC set to  0.000000
10/22/2010	2:23:25 PM	SiCl4 MFC set to  0.000000
10/22/2010	2:23:25 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	2:23:25 PM	Tube furnace set to 0
10/22/2010	2:24:25 PM	Helium valve closed
10/22/2010	2:24:25 PM	H2 valve closed
10/22/2010	2:24:25 PM	BCl3 valve closed
10/22/2010	2:24:25 PM	PH3 valve closed
10/22/2010	2:24:25 PM	SiCl4 pre valve closed
10/22/2010	2:24:25 PM	SiCl4 post valve closed
10/22/2010	2:24:25 PM	Bubbler valve closed
10/22/2010	2:24:25 PM	Main Vac valve opened
10/22/2010	2:24:25 PM	Bypass valve opened
10/22/2010	2:24:25 PM	Helium MFC set to  0.000000
10/22/2010	2:24:25 PM	H2 MFC set to  0.000000
10/22/2010	2:24:25 PM	BCl3 MFC set to  0.000000
10/22/2010	2:24:25 PM	PHl3 MFC set to  0.000000
10/22/2010	2:24:25 PM	SiCl4 MFC set to  0.000000
10/22/2010	2:24:25 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	2:24:25 PM	Tube furnace set to 0
10/22/2010	2:25:25 PM	H2 valve closed
10/22/2010	2:25:25 PM	BCl3 valve closed
10/22/2010	2:25:25 PM	PH3 valve closed
10/22/2010	2:25:25 PM	SiCl4 pre valve closed
10/22/2010	2:25:25 PM	SiCl4 post valve closed
10/22/2010	2:25:25 PM	Bubbler valve closed
10/22/2010	2:25:25 PM	Helium valve opened
10/22/2010	2:25:25 PM	Main Vac valve opened
10/22/2010	2:25:25 PM	Bypass valve opened
10/22/2010	2:25:26 PM	Helium MFC set to  100.000000
10/22/2010	2:25:26 PM	H2 MFC set to  0.000000
10/22/2010	2:25:26 PM	BCl3 MFC set to  0.000000
10/22/2010	2:25:26 PM	PHl3 MFC set to  0.000000
10/22/2010	2:25:26 PM	SiCl4 MFC set to  0.000000
10/22/2010	2:25:26 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	2:25:26 PM	Tube furnace set to 0
10/22/2010	2:26:26 PM	Helium valve closed
10/22/2010	2:26:26 PM	H2 valve closed
10/22/2010	2:26:26 PM	BCl3 valve closed
10/22/2010	2:26:26 PM	PH3 valve closed
10/22/2010	2:26:26 PM	SiCl4 pre valve closed
10/22/2010	2:26:26 PM	SiCl4 post valve closed
10/22/2010	2:26:26 PM	Bubbler valve closed
10/22/2010	2:26:26 PM	Main Vac valve opened
10/22/2010	2:26:26 PM	Bypass valve opened
10/22/2010	2:26:26 PM	Helium MFC set to  0.000000
10/22/2010	2:26:26 PM	H2 MFC set to  0.000000
10/22/2010	2:26:26 PM	BCl3 MFC set to  0.000000
10/22/2010	2:26:26 PM	PHl3 MFC set to  0.000000
10/22/2010	2:26:26 PM	SiCl4 MFC set to  0.000000
10/22/2010	2:26:26 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	2:26:26 PM	Tube furnace set to 0
10/22/2010	2:27:26 PM	H2 valve closed
10/22/2010	2:27:26 PM	BCl3 valve closed
10/22/2010	2:27:26 PM	PH3 valve closed
10/22/2010	2:27:26 PM	SiCl4 pre valve closed
10/22/2010	2:27:26 PM	SiCl4 post valve closed
10/22/2010	2:27:26 PM	Bubbler valve closed
10/22/2010	2:27:26 PM	Helium valve opened
10/22/2010	2:27:26 PM	Main Vac valve opened
10/22/2010	2:27:26 PM	Bypass valve opened
10/22/2010	2:27:26 PM	Helium MFC set to  100.000000
10/22/2010	2:27:26 PM	H2 MFC set to  0.000000
10/22/2010	2:27:26 PM	BCl3 MFC set to  0.000000
10/22/2010	2:27:26 PM	PHl3 MFC set to  0.000000
10/22/2010	2:27:26 PM	SiCl4 MFC set to  0.000000
10/22/2010	2:27:26 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	2:27:26 PM	Tube furnace set to 0
10/22/2010	2:28:26 PM	Helium valve closed
10/22/2010	2:28:26 PM	H2 valve closed
10/22/2010	2:28:26 PM	BCl3 valve closed
10/22/2010	2:28:26 PM	PH3 valve closed
10/22/2010	2:28:26 PM	SiCl4 pre valve closed
10/22/2010	2:28:26 PM	SiCl4 post valve closed
10/22/2010	2:28:26 PM	Bubbler valve closed
10/22/2010	2:28:26 PM	Main Vac valve opened
10/22/2010	2:28:26 PM	Bypass valve opened
10/22/2010	2:28:26 PM	Helium MFC set to  0.000000
10/22/2010	2:28:26 PM	H2 MFC set to  0.000000
10/22/2010	2:28:26 PM	BCl3 MFC set to  0.000000
10/22/2010	2:28:26 PM	PHl3 MFC set to  0.000000
10/22/2010	2:28:26 PM	SiCl4 MFC set to  0.000000
10/22/2010	2:28:26 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	2:28:26 PM	Tube furnace set to 0
10/22/2010	2:29:26 PM	H2 valve closed
10/22/2010	2:29:26 PM	BCl3 valve closed
10/22/2010	2:29:26 PM	PH3 valve closed
10/22/2010	2:29:26 PM	SiCl4 pre valve closed
10/22/2010	2:29:26 PM	SiCl4 post valve closed
10/22/2010	2:29:26 PM	Bubbler valve closed
10/22/2010	2:29:26 PM	Helium valve opened
10/22/2010	2:29:26 PM	Main Vac valve opened
10/22/2010	2:29:26 PM	Bypass valve opened
10/22/2010	2:29:26 PM	Helium MFC set to  100.000000
10/22/2010	2:29:26 PM	H2 MFC set to  0.000000
10/22/2010	2:29:26 PM	BCl3 MFC set to  0.000000
10/22/2010	2:29:26 PM	PHl3 MFC set to  0.000000
10/22/2010	2:29:26 PM	SiCl4 MFC set to  0.000000
10/22/2010	2:29:26 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	2:29:26 PM	Tube furnace set to 0
10/22/2010	2:30:26 PM	Helium valve closed
10/22/2010	2:30:26 PM	H2 valve closed
10/22/2010	2:30:26 PM	BCl3 valve closed
10/22/2010	2:30:26 PM	PH3 valve closed
10/22/2010	2:30:26 PM	SiCl4 pre valve closed
10/22/2010	2:30:26 PM	SiCl4 post valve closed
10/22/2010	2:30:26 PM	Bubbler valve closed
10/22/2010	2:30:26 PM	Main Vac valve opened
10/22/2010	2:30:26 PM	Bypass valve opened
10/22/2010	2:30:26 PM	Helium MFC set to  0.000000
10/22/2010	2:30:26 PM	H2 MFC set to  0.000000
10/22/2010	2:30:26 PM	BCl3 MFC set to  0.000000
10/22/2010	2:30:26 PM	PHl3 MFC set to  0.000000
10/22/2010	2:30:26 PM	SiCl4 MFC set to  0.000000
10/22/2010	2:30:26 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	2:30:27 PM	Tube furnace set to 0
10/22/2010	2:31:27 PM	H2 valve closed
10/22/2010	2:31:27 PM	BCl3 valve closed
10/22/2010	2:31:27 PM	PH3 valve closed
10/22/2010	2:31:27 PM	SiCl4 pre valve closed
10/22/2010	2:31:27 PM	SiCl4 post valve closed
10/22/2010	2:31:27 PM	Bubbler valve closed
10/22/2010	2:31:27 PM	Helium valve opened
10/22/2010	2:31:27 PM	Main Vac valve opened
10/22/2010	2:31:27 PM	Bypass valve opened
10/22/2010	2:31:27 PM	Helium MFC set to  100.000000
10/22/2010	2:31:27 PM	H2 MFC set to  0.000000
10/22/2010	2:31:27 PM	BCl3 MFC set to  0.000000
10/22/2010	2:31:27 PM	PHl3 MFC set to  0.000000
10/22/2010	2:31:27 PM	SiCl4 MFC set to  0.000000
10/22/2010	2:31:27 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	2:31:27 PM	Tube furnace set to 0
10/22/2010	2:32:27 PM	Helium valve closed
10/22/2010	2:32:27 PM	H2 valve closed
10/22/2010	2:32:27 PM	BCl3 valve closed
10/22/2010	2:32:27 PM	PH3 valve closed
10/22/2010	2:32:27 PM	SiCl4 pre valve closed
10/22/2010	2:32:27 PM	SiCl4 post valve closed
10/22/2010	2:32:27 PM	Bubbler valve closed
10/22/2010	2:32:27 PM	Main Vac valve opened
10/22/2010	2:32:27 PM	Bypass valve opened
10/22/2010	2:32:27 PM	Helium MFC set to  0.000000
10/22/2010	2:32:27 PM	H2 MFC set to  0.000000
10/22/2010	2:32:27 PM	BCl3 MFC set to  0.000000
10/22/2010	2:32:27 PM	PHl3 MFC set to  0.000000
10/22/2010	2:32:27 PM	SiCl4 MFC set to  0.000000
10/22/2010	2:32:27 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	2:32:27 PM	Tube furnace set to 0
10/22/2010	2:33:27 PM	H2 valve closed
10/22/2010	2:33:27 PM	BCl3 valve closed
10/22/2010	2:33:27 PM	PH3 valve closed
10/22/2010	2:33:27 PM	SiCl4 pre valve closed
10/22/2010	2:33:27 PM	SiCl4 post valve closed
10/22/2010	2:33:27 PM	Bubbler valve closed
10/22/2010	2:33:27 PM	Helium valve opened
10/22/2010	2:33:27 PM	Main Vac valve opened
10/22/2010	2:33:27 PM	Bypass valve opened
10/22/2010	2:33:27 PM	Helium MFC set to  100.000000
10/22/2010	2:33:27 PM	H2 MFC set to  0.000000
10/22/2010	2:33:27 PM	BCl3 MFC set to  0.000000
10/22/2010	2:33:27 PM	PHl3 MFC set to  0.000000
10/22/2010	2:33:27 PM	SiCl4 MFC set to  0.000000
10/22/2010	2:33:27 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	2:33:27 PM	Tube furnace set to 0
10/22/2010	2:34:27 PM	Helium valve closed
10/22/2010	2:34:27 PM	H2 valve closed
10/22/2010	2:34:27 PM	BCl3 valve closed
10/22/2010	2:34:27 PM	PH3 valve closed
10/22/2010	2:34:27 PM	SiCl4 pre valve closed
10/22/2010	2:34:27 PM	SiCl4 post valve closed
10/22/2010	2:34:27 PM	Bubbler valve closed
10/22/2010	2:34:27 PM	Main Vac valve opened
10/22/2010	2:34:27 PM	Bypass valve opened
10/22/2010	2:34:27 PM	Helium MFC set to  0.000000
10/22/2010	2:34:27 PM	H2 MFC set to  0.000000
10/22/2010	2:34:27 PM	BCl3 MFC set to  0.000000
10/22/2010	2:34:27 PM	PHl3 MFC set to  0.000000
10/22/2010	2:34:27 PM	SiCl4 MFC set to  0.000000
10/22/2010	2:34:27 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	2:34:27 PM	Tube furnace set to 0
10/22/2010	2:35:27 PM	H2 valve closed
10/22/2010	2:35:27 PM	BCl3 valve closed
10/22/2010	2:35:27 PM	PH3 valve closed
10/22/2010	2:35:27 PM	SiCl4 pre valve closed
10/22/2010	2:35:27 PM	SiCl4 post valve closed
10/22/2010	2:35:27 PM	Bubbler valve closed
10/22/2010	2:35:27 PM	Helium valve opened
10/22/2010	2:35:27 PM	Main Vac valve opened
10/22/2010	2:35:27 PM	Bypass valve opened
10/22/2010	2:35:27 PM	Helium MFC set to  100.000000
10/22/2010	2:35:27 PM	H2 MFC set to  0.000000
10/22/2010	2:35:27 PM	BCl3 MFC set to  0.000000
10/22/2010	2:35:27 PM	PHl3 MFC set to  0.000000
10/22/2010	2:35:27 PM	SiCl4 MFC set to  0.000000
10/22/2010	2:35:27 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	2:35:28 PM	Tube furnace set to 0
10/22/2010	2:36:28 PM	Helium valve closed
10/22/2010	2:36:28 PM	H2 valve closed
10/22/2010	2:36:28 PM	BCl3 valve closed
10/22/2010	2:36:28 PM	PH3 valve closed
10/22/2010	2:36:28 PM	SiCl4 pre valve closed
10/22/2010	2:36:28 PM	SiCl4 post valve closed
10/22/2010	2:36:28 PM	Bubbler valve closed
10/22/2010	2:36:28 PM	Main Vac valve opened
10/22/2010	2:36:28 PM	Bypass valve opened
10/22/2010	2:36:28 PM	Helium MFC set to  0.000000
10/22/2010	2:36:28 PM	H2 MFC set to  0.000000
10/22/2010	2:36:28 PM	BCl3 MFC set to  0.000000
10/22/2010	2:36:28 PM	PHl3 MFC set to  0.000000
10/22/2010	2:36:28 PM	SiCl4 MFC set to  0.000000
10/22/2010	2:36:28 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	2:36:28 PM	Tube furnace set to 0
10/22/2010	2:37:28 PM	H2 valve closed
10/22/2010	2:37:28 PM	BCl3 valve closed
10/22/2010	2:37:28 PM	PH3 valve closed
10/22/2010	2:37:28 PM	SiCl4 pre valve closed
10/22/2010	2:37:28 PM	SiCl4 post valve closed
10/22/2010	2:37:28 PM	Bubbler valve closed
10/22/2010	2:37:28 PM	Helium valve opened
10/22/2010	2:37:28 PM	Main Vac valve opened
10/22/2010	2:37:28 PM	Bypass valve opened
10/22/2010	2:37:28 PM	Helium MFC set to  100.000000
10/22/2010	2:37:28 PM	H2 MFC set to  0.000000
10/22/2010	2:37:28 PM	BCl3 MFC set to  0.000000
10/22/2010	2:37:28 PM	PHl3 MFC set to  0.000000
10/22/2010	2:37:28 PM	SiCl4 MFC set to  0.000000
10/22/2010	2:37:28 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	2:37:28 PM	Tube furnace set to 0
10/22/2010	2:38:28 PM	Helium valve closed
10/22/2010	2:38:28 PM	H2 valve closed
10/22/2010	2:38:28 PM	BCl3 valve closed
10/22/2010	2:38:28 PM	PH3 valve closed
10/22/2010	2:38:28 PM	SiCl4 pre valve closed
10/22/2010	2:38:28 PM	SiCl4 post valve closed
10/22/2010	2:38:28 PM	Bubbler valve closed
10/22/2010	2:38:28 PM	Main Vac valve opened
10/22/2010	2:38:28 PM	Bypass valve opened
10/22/2010	2:38:28 PM	Helium MFC set to  0.000000
10/22/2010	2:38:28 PM	H2 MFC set to  0.000000
10/22/2010	2:38:28 PM	BCl3 MFC set to  0.000000
10/22/2010	2:38:28 PM	PHl3 MFC set to  0.000000
10/22/2010	2:38:28 PM	SiCl4 MFC set to  0.000000
10/22/2010	2:38:28 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	2:38:28 PM	Tube furnace set to 0
10/22/2010	2:39:28 PM	H2 valve closed
10/22/2010	2:39:28 PM	BCl3 valve closed
10/22/2010	2:39:28 PM	PH3 valve closed
10/22/2010	2:39:28 PM	SiCl4 pre valve closed
10/22/2010	2:39:28 PM	SiCl4 post valve closed
10/22/2010	2:39:28 PM	Bubbler valve closed
10/22/2010	2:39:28 PM	Helium valve opened
10/22/2010	2:39:28 PM	Main Vac valve opened
10/22/2010	2:39:28 PM	Bypass valve opened
10/22/2010	2:39:28 PM	Helium MFC set to  100.000000
10/22/2010	2:39:28 PM	H2 MFC set to  0.000000
10/22/2010	2:39:28 PM	BCl3 MFC set to  0.000000
10/22/2010	2:39:28 PM	PHl3 MFC set to  0.000000
10/22/2010	2:39:28 PM	SiCl4 MFC set to  0.000000
10/22/2010	2:39:28 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	2:39:28 PM	Tube furnace set to 0
10/22/2010	2:40:28 PM	Helium valve closed
10/22/2010	2:40:28 PM	H2 valve closed
10/22/2010	2:40:28 PM	BCl3 valve closed
10/22/2010	2:40:28 PM	PH3 valve closed
10/22/2010	2:40:28 PM	SiCl4 pre valve closed
10/22/2010	2:40:28 PM	SiCl4 post valve closed
10/22/2010	2:40:28 PM	Bubbler valve closed
10/22/2010	2:40:28 PM	Main Vac valve opened
10/22/2010	2:40:28 PM	Bypass valve opened
10/22/2010	2:40:28 PM	Helium MFC set to  0.000000
10/22/2010	2:40:28 PM	H2 MFC set to  0.000000
10/22/2010	2:40:28 PM	BCl3 MFC set to  0.000000
10/22/2010	2:40:28 PM	PHl3 MFC set to  0.000000
10/22/2010	2:40:28 PM	SiCl4 MFC set to  0.000000
10/22/2010	2:40:28 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	2:40:29 PM	Tube furnace set to 0
10/22/2010	2:41:29 PM	H2 valve closed
10/22/2010	2:41:29 PM	BCl3 valve closed
10/22/2010	2:41:29 PM	PH3 valve closed
10/22/2010	2:41:29 PM	SiCl4 pre valve closed
10/22/2010	2:41:29 PM	SiCl4 post valve closed
10/22/2010	2:41:29 PM	Bubbler valve closed
10/22/2010	2:41:29 PM	Helium valve opened
10/22/2010	2:41:29 PM	Main Vac valve opened
10/22/2010	2:41:29 PM	Bypass valve opened
10/22/2010	2:41:29 PM	Helium MFC set to  100.000000
10/22/2010	2:41:29 PM	H2 MFC set to  0.000000
10/22/2010	2:41:29 PM	BCl3 MFC set to  0.000000
10/22/2010	2:41:29 PM	PHl3 MFC set to  0.000000
10/22/2010	2:41:29 PM	SiCl4 MFC set to  0.000000
10/22/2010	2:41:29 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	2:41:29 PM	Tube furnace set to 0
10/22/2010	2:42:29 PM	Helium valve closed
10/22/2010	2:42:29 PM	H2 valve closed
10/22/2010	2:42:29 PM	BCl3 valve closed
10/22/2010	2:42:29 PM	PH3 valve closed
10/22/2010	2:42:29 PM	SiCl4 pre valve closed
10/22/2010	2:42:29 PM	SiCl4 post valve closed
10/22/2010	2:42:29 PM	Bubbler valve closed
10/22/2010	2:42:29 PM	Main Vac valve opened
10/22/2010	2:42:29 PM	Bypass valve opened
10/22/2010	2:42:29 PM	Helium MFC set to  0.000000
10/22/2010	2:42:29 PM	H2 MFC set to  0.000000
10/22/2010	2:42:29 PM	BCl3 MFC set to  0.000000
10/22/2010	2:42:29 PM	PHl3 MFC set to  0.000000
10/22/2010	2:42:29 PM	SiCl4 MFC set to  0.000000
10/22/2010	2:42:29 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	2:42:29 PM	Tube furnace set to 0
10/22/2010	2:42:30 PM	Run finished at 2:42 PM
10/22/2010	2:42:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/22/2010	3:25:34 PM	Helium valve opened
10/22/2010	3:25:37 PM	Helium MFC set to  100.000000
10/22/2010	3:27:25 PM	Helium valve closed
10/22/2010	3:27:27 PM	Helium MFC set to  0.000000
10/22/2010	3:28:25 PM	Recipe started at 3:28 PM
10/22/2010	3:28:25 PM	Helium valve closed
10/22/2010	3:28:25 PM	BCl3 valve closed
10/22/2010	3:28:25 PM	PH3 valve closed
10/22/2010	3:28:25 PM	SiCl4 pre valve closed
10/22/2010	3:28:25 PM	SiCl4 post valve closed
10/22/2010	3:28:25 PM	Main Vac valve closed
10/22/2010	3:28:25 PM	Bypass valve closed
10/22/2010	3:28:25 PM	Bubbler valve closed
10/22/2010	3:28:25 PM	H2 valve opened
10/22/2010	3:28:25 PM	Helium MFC set to  0.000000
10/22/2010	3:28:25 PM	H2 MFC set to  500.000000
10/22/2010	3:28:25 PM	BCl3 MFC set to  0.000000
10/22/2010	3:28:25 PM	PHl3 MFC set to  0.000000
10/22/2010	3:28:25 PM	SiCl4 MFC set to  0.000000
10/22/2010	3:28:25 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	3:28:26 PM	Tube furnace set to 0
10/22/2010	3:29:47 PM	Helium valve closed
10/22/2010	3:29:47 PM	BCl3 valve closed
10/22/2010	3:29:47 PM	PH3 valve closed
10/22/2010	3:29:47 PM	SiCl4 pre valve closed
10/22/2010	3:29:47 PM	SiCl4 post valve closed
10/22/2010	3:29:47 PM	Main Vac valve closed
10/22/2010	3:29:47 PM	Bypass valve closed
10/22/2010	3:29:47 PM	H2 valve opened
10/22/2010	3:29:47 PM	Bubbler valve opened
10/22/2010	3:29:47 PM	Helium MFC set to  0.000000
10/22/2010	3:29:47 PM	H2 MFC set to  500.000000
10/22/2010	3:29:47 PM	BCl3 MFC set to  0.000000
10/22/2010	3:29:47 PM	PHl3 MFC set to  0.000000
10/22/2010	3:29:47 PM	SiCl4 MFC set to  0.000000
10/22/2010	3:29:47 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	3:29:47 PM	Tube furnace set to 1000
10/22/2010	3:38:35 PM	Helium valve closed
10/22/2010	3:38:35 PM	PH3 valve closed
10/22/2010	3:38:35 PM	Main Vac valve closed
10/22/2010	3:38:35 PM	Bypass valve closed
10/22/2010	3:38:35 PM	H2 valve opened
10/22/2010	3:38:35 PM	BCl3 valve opened
10/22/2010	3:38:35 PM	SiCl4 pre valve opened
10/22/2010	3:38:35 PM	SiCl4 post valve opened
10/22/2010	3:38:35 PM	Bubbler valve opened
10/22/2010	3:38:35 PM	Helium MFC set to  0.000000
10/22/2010	3:38:35 PM	H2 MFC set to  500.000000
10/22/2010	3:38:35 PM	BCl3 MFC set to  10.000000
10/22/2010	3:38:35 PM	PHl3 MFC set to  0.000000
10/22/2010	3:38:35 PM	SiCl4 MFC set to  50.000000
10/22/2010	3:38:35 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	3:38:35 PM	Tube furnace set to 875
10/22/2010	3:41:52 PM	Helium valve closed
10/22/2010	3:41:52 PM	PH3 valve closed
10/22/2010	3:41:52 PM	Main Vac valve closed
10/22/2010	3:41:52 PM	Bypass valve closed
10/22/2010	3:41:52 PM	H2 valve opened
10/22/2010	3:41:52 PM	BCl3 valve opened
10/22/2010	3:41:52 PM	SiCl4 pre valve opened
10/22/2010	3:41:52 PM	SiCl4 post valve opened
10/22/2010	3:41:52 PM	Bubbler valve opened
10/22/2010	3:41:52 PM	Helium MFC set to  0.000000
10/22/2010	3:41:52 PM	H2 MFC set to  500.000000
10/22/2010	3:41:52 PM	BCl3 MFC set to  10.000000
10/22/2010	3:41:52 PM	PHl3 MFC set to  0.000000
10/22/2010	3:41:52 PM	SiCl4 MFC set to  50.000000
10/22/2010	3:41:52 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	3:41:52 PM	Tube furnace set to 850
10/22/2010	3:46:52 PM	H2 valve closed
10/22/2010	3:46:52 PM	BCl3 valve closed
10/22/2010	3:46:52 PM	PH3 valve closed
10/22/2010	3:46:52 PM	SiCl4 pre valve closed
10/22/2010	3:46:52 PM	SiCl4 post valve closed
10/22/2010	3:46:52 PM	Main Vac valve closed
10/22/2010	3:46:52 PM	Bypass valve closed
10/22/2010	3:46:52 PM	Helium valve opened
10/22/2010	3:46:52 PM	Bubbler valve opened
10/22/2010	3:46:52 PM	Helium MFC set to  500.000000
10/22/2010	3:46:52 PM	H2 MFC set to  0.000000
10/22/2010	3:46:52 PM	BCl3 MFC set to  0.000000
10/22/2010	3:46:52 PM	PHl3 MFC set to  0.000000
10/22/2010	3:46:52 PM	SiCl4 MFC set to  0.000000
10/22/2010	3:46:52 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	3:46:52 PM	Tube furnace set to 0
10/22/2010	4:06:52 PM	Helium valve closed
10/22/2010	4:06:52 PM	H2 valve closed
10/22/2010	4:06:52 PM	BCl3 valve closed
10/22/2010	4:06:52 PM	PH3 valve closed
10/22/2010	4:06:52 PM	SiCl4 pre valve closed
10/22/2010	4:06:52 PM	SiCl4 post valve closed
10/22/2010	4:06:52 PM	Main Vac valve closed
10/22/2010	4:06:52 PM	Bypass valve closed
10/22/2010	4:06:52 PM	Bubbler valve closed
10/22/2010	4:06:52 PM	Helium MFC set to  0.000000
10/22/2010	4:06:52 PM	H2 MFC set to  0.000000
10/22/2010	4:06:52 PM	BCl3 MFC set to  0.000000
10/22/2010	4:06:52 PM	PHl3 MFC set to  0.000000
10/22/2010	4:06:52 PM	SiCl4 MFC set to  0.000000
10/22/2010	4:06:52 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	4:06:52 PM	Tube furnace set to 0
10/22/2010	4:06:52 PM	Run finished at 4:06 PM
10/22/2010	5:24:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2010	5:24:24 PM	Recipe started at 5:24 PM
10/22/2010	5:24:24 PM	Helium valve closed
10/22/2010	5:24:24 PM	H2 valve closed
10/22/2010	5:24:24 PM	BCl3 valve closed
10/22/2010	5:24:24 PM	PH3 valve closed
10/22/2010	5:24:24 PM	SiCl4 pre valve closed
10/22/2010	5:24:24 PM	SiCl4 post valve closed
10/22/2010	5:24:24 PM	Main Vac valve closed
10/22/2010	5:24:24 PM	Bubbler valve closed
10/22/2010	5:24:24 PM	Bypass valve opened
10/22/2010	5:24:24 PM	Helium MFC set to  0.000000
10/22/2010	5:24:24 PM	H2 MFC set to  0.000000
10/22/2010	5:24:24 PM	BCl3 MFC set to  0.000000
10/22/2010	5:24:24 PM	PHl3 MFC set to  0.000000
10/22/2010	5:24:24 PM	SiCl4 MFC set to  0.000000
10/22/2010	5:24:24 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	5:24:24 PM	Tube furnace set to 0
10/22/2010	5:25:11 PM	Helium valve closed
10/22/2010	5:25:11 PM	H2 valve closed
10/22/2010	5:25:11 PM	BCl3 valve closed
10/22/2010	5:25:11 PM	PH3 valve closed
10/22/2010	5:25:11 PM	SiCl4 pre valve closed
10/22/2010	5:25:11 PM	SiCl4 post valve closed
10/22/2010	5:25:11 PM	Bubbler valve closed
10/22/2010	5:25:11 PM	Main Vac valve opened
10/22/2010	5:25:11 PM	Bypass valve opened
10/22/2010	5:25:11 PM	Helium MFC set to  0.000000
10/22/2010	5:25:11 PM	H2 MFC set to  0.000000
10/22/2010	5:25:11 PM	BCl3 MFC set to  0.000000
10/22/2010	5:25:11 PM	PHl3 MFC set to  0.000000
10/22/2010	5:25:11 PM	SiCl4 MFC set to  0.000000
10/22/2010	5:25:11 PM	Bypass solenoid MFC set to  0.000000
10/22/2010	5:25:12 PM	Tube furnace set to 0
10/22/2010	5:25:12 PM	Run finished at 5:25 PM
10/22/2010	5:25:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
